| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a misregister detection method which enables detecting of a misregister including a conventional register mark without any limitation by the shape or arrangement of the register mark. <P>SOLUTION: The misregister detection method comprises a register mark registration process for registering a register mark image as a detection object, a register mark photographing process for obtaining a photographed image by photographing a region including the two register marks as the detection object using an area sensor camera, a register mark extraction process for specifying the two register marks in the photographed image, referring to the registered register mark, and a misregister level calculation process for calculating the misregister level based on coordinates of the two register marks in the photographed image. Also the device to which this method is applied is provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
