| 摘要 |
PROBLEM TO BE SOLVED: To correct curvature of the field without providing an fθcorrection optical system in a scanning exposure apparatus. SOLUTION: A laser beam 30a formed with a laser light source 30 with a predetermined luminous flux diameter is reflected with a variable curvature mirror 20 and deflected with a polygon scanner 5, and an exposure face 6 is scanned. The curvature of the reflection face 21a of the variable curvature mirror 20 is varied with a variable curvature mirror control means 51 according to the scanning position with the laser beam 30a, and the image curvature on the exposure face 6 is corrected. Further, the exposing position and the exposing quantity of the laser beam 30a in a main scanning direction on the exposure face 6 are corrected with an exposure control means 8. COPYRIGHT: (C)2006,JPO&NCIPI
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