| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating device which is advantageous in space and can continuously coat a glass substrate with a coating liquid by one slit nozzle. <P>SOLUTION: A portal moving mechanism 4 is made to move to a cleaning part 12 of other waiting part 10, when coating the surface of the glass substrate W with the coating liquid being finished, and the slit nozzle 6 is cleaned at the cleaning part 12 to prepare a next coating. At the same time, the coating liquid for a next one-time-coating liquid is supplied to a syringe pump 44 and the coated glass substrate W is removed from a substrate-placing-stage 3 so that a new glass substrate W is set. When the new glass substrate W is set, the portal moving mechanism 4 is moved to the predispensing part 11 of the other waiting part 10 to precoat the slit nozzle 6 at the predispensing part 11. Thereafter, the portal moving mechanism 4 is moved to the left direction and the coating liquid is supplied to the surface of the glass substrate W. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
