| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress the variation of the formation of an internal work area in fracturing a member to be fractured provided with a structure on a surface by condensing a laser beam to the inside. <P>SOLUTION: The surface of the member to be fractured is irradiated with a laser beam such that the structure 2F provided on the surface of the member to be fractured does not enter the luminous flux of the laser beam LB made incident on the surface of the member 10 to be fractured. In the case of defining the height of the end part of the structure 2F on the side of the laser beam flux emitted toward the inside of the member to be fractured as h, an angle formed by the laser beam with the perpendicular of the surface 12 outside the member to be fractured asθ1, an angle formed by the laser beam with the perpendicular of the surface 12 inside the member to be fractured asθ2, and a distance from the laser beam irradiation surface of the surface 12 of the member to be fractured to a laser condensing point A inside as L, when a distance between a fracture line C and the structure 2F as (a), (a)>h×tanθ1+L×tanθ2 is defined. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
