| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape correction polishing method capable of working in high precision. SOLUTION: Unit removing quantity is found by working a work of the same material as a working object and having a standard shape under the same conditions (polishing load, tool moving speed, etc.) as in actual working by using a tool used for the actual working. An ideal unit removing shape of the tool and the work curvatures of which match with each other is found as a form integrating a passing distance of the tool in a unit removing region. Internal pressure distribution of the tool surface making contact with the work is found by simulation from a shape, dimensions and a physical property of a tool constitutional material, a shape of a working portion, a load working on the tool and its load working point at an optional position on the work, and it is normalized between 0 and 1 by specifying the maximum pressure value as 1 for this pressure distribution. COPYRIGHT: (C)2006,JPO&NCIPI
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