| 摘要 |
A compact plasma generating apparatus providing high efficiency of plasma excitation is presented. A plasma generating apparatus ( 100 ) comprises a microwave generating apparatus ( 10 ) for generating microwaves, a coaxial waveguide ( 20 ) having a coaxial structure comprising an inner tube ( 20 a) and an outer tube ( 20 b), a monopole antenna ( 21 ) being attached to one end of said inner tube ( 20 a), for directing the microwaves generated by said microwave generating apparatus ( 10 ) to the monopole antenna ( 21 ), a resonator ( 22 ) composed of dielectric material for holding the monopole antenna ( 21 ), and a chamber ( 23 ) in which a specific process gas is fed for plasma excitation. The chamber ( 23 ) has an open surface and the resonator ( 22 ) is placed on this open surface, and the process gas is excited by the microwaves radiated from the monopole antenna ( 21 ) through the resonator ( 22 ) into the interior of the chamber ( 23 ) to generate plasma.
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