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发明名称
Cleaning of semiconductor devices
摘要
申请公布号
US3383319(A)
申请公布日期
1968.05.14
申请号
US19650502316
申请日期
1965.10.22
申请人
MOTOROLA, INC.
发明人
BLACK JAMES R.
分类号
H01L21/306;H01L21/3105
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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