| 摘要 |
<p>An aspect of the present invention includes a method for stabilizing against a drift of a deflection of a micromirror device having an electrostatic actuator, including the actions of: providing an actuator including at least two members being said micromirror and at lest one electrode bebeath said micromirror, at least one of said at least two members being formed in a semiconducting material, providing a surface layer on said at lest one semiconducting member facing towards said other member of said actuator, said surface layer having a density of cariers being 10<SUP>17</SUP> cm<SUP>3</SUP> or higher.</p> |
