| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently remove corrosive acidic gas (hydrochloride or the like) in treating gas in low pressure loss. <P>SOLUTION: A metal filter that removes the acidic gas by contacting and reacting with the treating gas containing the corrosive acidic gas is formed in honeycombs or fins. Such a metal filter may be configured by (i) a laminate of a plurality of metal strips through spacers, (ii) an interlaminate of flat metal strips and corrugated metal strips, (iii) a honeycomb metal molding or the like. A metal that configures the metal filter may be aluminum or the like. Such a metal filter is useful for purifying a clean room. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
