| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring temperature capable of measuring a temperature highly accurately in the noncontact state without requiring a complicated hardware constitution, and a semiconductor heat treating device using the temperature measuring method. SOLUTION: In order to measure the temperature of a semiconductor wafer 3 in the noncontact state, radiated light from the semiconductor wafer 3 is measured, and the temperature of a semiconductor wafer 3 is operated, while estimating an effective radiation rate as an unknown variable, based on a measurement result of the radiated light. Estimation of the effective radiation rate and operation of the temperature are performed by using an extended Kalman filter. COPYRIGHT: (C)2006,JPO&NCIPI |
