| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method for picking up chip by which various kinds of chips having different sizes can be picked up stably. SOLUTION: The chip picking-up device which picks up a chip 6 stuck to a sheet 5 with an adhesive layer 5a having such a property that generates a nitrogen gas when the layer 5a is irradiated with ultraviolet rays, from the sheet 5 where the chip 6 is stuck, is provided with a shutter section constituted by laminating two light shielding plates 37 and 38 upon another between an UV light source section 8b and the sheet 5. The light transmitting sections 37b and 38b of the light shielding plates 37 and 38 can freely change a laminated light transmitting range T, and the light transmitting range T of the light irradiated upon the sheet 5 is changed in accordance with the shape/size of the chip 6 before the light is irradiated. Consequently, the chip picking-up device can stably pick up various kinds of chips having different sizes by irradiating the range corresponding to a chip to be picked up with light. COPYRIGHT: (C)2006,JPO&NCIPI |
