| 摘要 |
PROBLEM TO BE SOLVED: To quickly and easily determine the optimum measuring condition, in a sample generating a change in a shape or a dimension by irradiation of an electron beam. SOLUTION: The dimension is measured repeatedly while changing the measuring condition. The measuring condition such as an acceleration voltage is changed to execute the measurement until a shrinkage amount and measurement reproducibility are satisfy preset reference values, and the optimum measuring condition is searched by this manner. COPYRIGHT: (C)2006,JPO&NCIPI
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