| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern inspection apparatus capable of rapidly and conveniently creating a recipe and checking a defect. SOLUTION: A defect checking screen includes; a map display section 61 for displaying a wafer map; an image display section 62 for displaying a defective image in a listed fashion; a list display section 63 for displaying and setting detailed information of the defect; and a graph display section 64 for carrying out a graphic display about a selected defect item. Respective display sections operate in conjunction with each other, whereby the defective image, the defect information list and the defect graph are changed in response to selected map information. A classification code, a clustering criterion and a display filter which are input by utilizing the information, are registered into the recipe. COPYRIGHT: (C)2006,JPO&NCIPI
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