| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detecting device capable of simply and exactly inputting a compensation parameter of a main scale into a detection head section. SOLUTION: A diffraction grating 111 is formed on the main scale 110, and a serial number 112 is given thereto. The compensation parameter corresponding to the serial number 112 is stored in a compensation parameter memory table 151 disposed in a host computer 150. When moving relatively to the main scale 110, the detection head section 120 receives diffracted light from the diffraction grating 111, compensates an obtained reception signal by using the compensation parameter and outputs it. In the case of exchanging the main scale, the serial number 112 of the main scale 110 is recognized by a CCD camera 130, and the corresponding compensation parameter in the compensation parameter memory table 151 is read out and input to the detection head section 120 in order to set it therein. COPYRIGHT: (C)2006,JPO&NCIPI
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