| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that when restored full-shape data are separated by an FFT or the like at respective frequencies in order to evaluate a roughness shape being one of high-frequency shapes, an error is caused by shifting of positions where the high-frequency shapes of separated measurement data are interfaced. SOLUTION: A means is provided, which separates an object to be measured so as to overlap each other and carries out its measurement. The separated measurement data obtained by carrying out the separation and measurement, are divided into a low-frequency shape component and a high-frequency shape component, and an approximately interfacing process is carried out by using only data of the low-frequency shape component in the overlap region, and then an interfacing process is carried out by using only data of the high-frequency shape component in the overlap region, thereby restoring the full shape and precisely evaluating the roughness shape of the full shape. COPYRIGHT: (C)2006,JPO&NCIPI
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