| 摘要 |
PROBLEM TO BE SOLVED: To restrain oscillating wave from occurring in a specimen solution without complicating or upsizing a flow cell (flow path) for the solution thereby preventing the occurrence of reflected wave or gas bubbles owing thereto. SOLUTION: As to a sensor body 100, at least one surface of a piezoelectric substrate is carved by etching to construct a flow cell part for the specimen solution in this carved part, and one electrode is formed on a bottom surface while forming an electrode on the other surface, thereby constructing a vibrator part. An acoustic impedance matching-sound wave absorption-attenuation member 200 comprises a member matching with the acoustic impedance to a sound wave propagating through the specimen solution and further absorbing/attenuating the sound wave transmitted. The member 200 is layered on an upper part of the sensor body so as to face on the carved part, lids the carved part, and has a structure provided with a pair of through holes 21 and 22 for inletting and discharging the specimen solution from both sides of the carved part. COPYRIGHT: (C)2006,JPO&NCIPI
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