发明名称 Insulating film and electronic device
摘要 An insulating film comprising: a first barrier layer;a well layer provided; and a second barrier layer is proposed. The first barrier layer consists of a material having a first bandgap and a first relative permittivity. The well layer is provided on the first. barrier layer, and consists of a material having a second bandgap smaller than the first bandgap and having a second relative permittivity larger than first relative permittivity. Discrete energy levels are formed in the well layer by a quantum effect. The second barrier layer is provided on the well layer, and consists of a material having a third bandgap larger than the second bandgap and having a third relative permittivity smaller than second relative permittivity. Alternatively, an insulating film comprising: n (n being an integer larger than 2) layers of barrier layer consisting of a material having a bandgap larger than a first bandgap and having a relative permittivity smaller than a first relative permittivity; and (n-1) layers of well layers consisting of a material having a bandgap smaller than the first bandgap and having a relative permittivity larger than the first relative permittivity, discrete energy levels being formed. in the well layer by a quantum effect, each of the barrier layers and each of the well layers being stacked by turns, and discrete energy levels being formed in each of the well layers by a quantum. effect, is provided. Alternatively, an insulating film having a lattice mismatch within a range of plus-or-minus 1.5% to the substrate, and further having a high barrier and a large permittivity is provided.
申请公布号 US2006138508(A1) 申请公布日期 2006.06.29
申请号 US20060347244 申请日期 2006.02.06
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SHIMIZU TATSUO;SATAKE HIDEKI
分类号 H01L27/04;H01L29/94;H01L21/00;H01L21/02;H01L21/28;H01L21/314;H01L21/316;H01L21/822;H01L29/12;H01L29/15;H01L29/51;H01L29/78;H01L29/786 主分类号 H01L27/04
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