发明名称 LITHOGRAPHY AND ASSOCIATED METHODS, DEVICES, AND SYSTEMS
摘要 An apparatus for forming an energy pattern on a target, comprising a projector (70) including a first row of spaced-apart energy outlets (74) arranged in a first pattern, a second row of spaced apart energy outlets (74) arranged in a second pattern, wherein the first pattern is different than the second pattern, and comprising a platform (100) on which the target (80) can be mounted, a motor (110) and a controller (112). A method of forming a pattern in a layer of energy-sensitive material, comprising projecting a first energy pattern onto the energy-sensitive material, moving the first energy pattern relative to the layer of energy-sensitive material, projecting a second energy pattern onto the energy-sensitive material, wherein the second energy pattern is different than the first energy pattern, and moving the second energy pattern relative to the layer of energy-sensitive material.
申请公布号 WO2006069340(A2) 申请公布日期 2006.06.29
申请号 WO2005US46876 申请日期 2005.12.21
申请人 CARNEGIE MELLON UNIVERSITY;MALY, WOJCIECH, P. 发明人 MALY, WOJCIECH, P.
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