发明名称 Semiconductor transistor device and method for manufacturing the same
摘要 A semiconductor transistor device and a method for manufacturing the same are provided. The method includes forming a silicon epitaxial layer having a predetermined thickness in source and drain diffusion regions of a silicon semiconductor substrate and forming a source and drain junction by ion implantation and rapid annealing in the silicon semiconductor substrate in which the silicon epitaxial layer is formed. The semiconductor transistor device includes a silicon epitaxial layer formed to have a predetermined thickness in source and drain diffusion regions of a silicon semiconductor substrate. Thus, since a salicide layer is used without increase of leakage current, the transistor device having low power and high performance can be manufactured.
申请公布号 US2006141721(A1) 申请公布日期 2006.06.29
申请号 US20050319229 申请日期 2005.12.28
申请人 DONGBUANAM SEMICONDUCTOR INC. 发明人 LEE YOUNG S.
分类号 H01L21/336 主分类号 H01L21/336
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