METHOD FOR PRODUCING Mo ALLOY POWDER TO BE PRESSURE-SINTERED, AND METHOD FOR PRODUCING TARGET MATERIAL FOR SPUTTERING

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a Mo alloy powder to be pressure-sintered which reduces an uneven component distribution in a Mo alloy sintered compact and the deformation of the sintered compact, when used as a material for producing the sintered compact through being pressure-sintered. SOLUTION: The method for producing the Mo alloy powder to be pressure-sintered comprises the steps of: preparing a mixture powder by mixing a Mo powder with an average particle diameter of 20μm and a transition metal powder with an average particle diameter of 500μm; sintering the mixture powder in a reducing atmosphere into a temporary sintered body; and subsequently pulverizing it into the powder with an average particle diameter of 0.02 to 10 mm. The method for producing the Mo alloy powder to be pressure-sintered also includes pulverizing the temporary sintered body into the powder with an average particle diameter of 0.05 to 3 mm. COPYRIGHT: (C)2006,JPO&NCIPI