| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern forming method capable of forming various kinds of patterns with high fineness and high accuracy at a low cost. SOLUTION: A stamp 1 is produced by forming a liquid-repellent pattern 1b on a hydrophilic substrate 1a. After a material 3 having flowability is packed onto the substrate 1a of the stamp 1, the stamp 1 and the other substrate 5 are brought into tight contact with each other. By heating and vaporizing the material 3 in this state, steam 6 is generated within a minute hermetic space surrounded by the stamp 1, the substrate 5, and the pattern 1b. The pattern 7 is formed by allowing the steam 6 to adhere to the surface of the substrate 5. The material 3 having the flowability is a liquid, solution mixture, dispersion liquid, etc. COPYRIGHT: (C)2006,JPO&NCIPI
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