| 摘要 |
<p>A near field analysis apparatus comprising: an irradiation optical system and a light collecting optical system, characterized by: the irradiation optical system comprising an irradiation-side adjustable optical system for adjusting the position or angle of optical axis thereof, and irradiating irradiation-side guide light onto an adjustment surface via the adjustable optical system; the light collecting optical system comprising a light-collection-side adjustable optical system for adjusting the position or angle of optical axis thereof, and irradiating light-collection-side guide light onto the adjustment surface via the adjustable optical system; an irradiation-side adjustment device for adjusting the position or angle of the adjustable optical system such that the spots of guide light, which are observed at the adjustment surface, match; and a light-collection-side adjustment device for adjusting the position or angle of the adjustable optical system such that the spots of the guide light, which are observed at the adjustment surface, match.</p> |
