发明名称 Ferroelectric film and method of manufacturing the same
摘要 A method of manufacturing a ferroelectric film including: (a) mixing a polycarboxylate containing niobium, a polycarboxylate containing bismuth, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent; and (b) applying the resulting mixed solution to a substrate and heat-treating the applied mixed solution to form a ferroelectric film including BiNbO 4 .
申请公布号 EP1675163(A2) 申请公布日期 2006.06.28
申请号 EP20050028009 申请日期 2005.12.21
申请人 SEIKO EPSON CORPORATION 发明人 KIJIMA, TAKESHI;HAMADA, YASUAKI;KOBAYASHI, TOMOKAZU
分类号 H01L21/316;C04B35/495;H01L21/8246;H01L27/115 主分类号 H01L21/316
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