发明名称 |
Ferroelectric film and method of manufacturing the same |
摘要 |
A method of manufacturing a ferroelectric film including: (a) mixing a polycarboxylate containing niobium, a polycarboxylate containing bismuth, a polycarboxylic acid or a polycarboxylic acid ester, and an organic solvent; and (b) applying the resulting mixed solution to a substrate and heat-treating the applied mixed solution to form a ferroelectric film including BiNbO 4 .
|
申请公布号 |
EP1675163(A2) |
申请公布日期 |
2006.06.28 |
申请号 |
EP20050028009 |
申请日期 |
2005.12.21 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
KIJIMA, TAKESHI;HAMADA, YASUAKI;KOBAYASHI, TOMOKAZU |
分类号 |
H01L21/316;C04B35/495;H01L21/8246;H01L27/115 |
主分类号 |
H01L21/316 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|