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发明名称
WAFER ETCHING TECHNIQUES
摘要
申请公布号
EP1673804(A1)
申请公布日期
2006.06.28
申请号
EP20040795193
申请日期
2004.10.14
申请人
NORTHROP GRUMMAN CORPORATION
发明人
ELMADJIAN, RAFFI, N.;SABIN, EDWIN, W.;ROGERS, HARVEY, N.
分类号
H01L21/027;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L21/027
代理机构
代理人
主权项
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