METHOD AND APPARATUS FOR CONVEYING THIN SHEET-LIKE SUBSTRATE,申请号EP19970912528-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR CONVEYING THIN SHEET-LIKE SUBSTRATE
摘要
申请公布号	EP0889515(B1)	申请公布日期	2006.06.28
申请号	EP19970912528	申请日期	1997.11.21
申请人	TAIYO NIPPON SANSO CORPORATION;TODA, MASAYUKI;OHMI, TADAHIRO	发明人	TODA, MASAYUKI;OHMI, TADAHIRO;ISHIHARA, YOSHIO
分类号	B65G49/00;H01L21/00;B65G49/07;H01L21/677	主分类号	B65G49/00
代理机构		代理人
主权项
地址

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