Scanning micro-mirror package, method for fabricating the same, and optical scanning device employing the same

摘要

Disclosed herein are a scanning micro-mirror package for use in optical scanning devices in which micro-mirrors reflect incident beams and modulate the optical path of the reflected beams in response to input signals and a method for fabricating the same. The scanning micro-mirror package comprises a suitable lid having therein a transparent window through which light beams pass and a housing combined with the lid, wherein a micro-mirror is protected from external impacts and conduct its own functions well. The scanning micro-mirror package is applicable to a device which displays or reads image information or data by scanning a light beam emergent from a light source over a predetermined range. Having such a structure, the scanning micro-mirror package allows the micro-mirror to optimally exhibit its optical and mechanical performance in addition to protecting the micro-mirror from external factors which adversely influence the performance. Also, the scanning micro-mirror package can be fabricated in a slim and lightweight form and is applicable to scanning systems employing various types of micro-mirrors, with the expectation that the production cost can be lowered.