发明名称 |
PACKAGING DEVICE AND PACKAGING METHOD FOR HOLLOW CATHODE TYPE SPATTERING TARGET |
摘要 |
Provided are a packaging device and packaging method of a hollow cathode sputtering target which installs, in the hollow cathode sputtering target, a cover of a size capable of covering a void of the target; provides one or more through-holes to the cover; places a resin bag over them, and performs vacuum suction to the inside of the bag. This packaging device and packaging method of a hollow cathode sputtering target is capable of performing vacuum suction even to the inside of the hollow portion covered with the resin bag.
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申请公布号 |
EP1674396(A1) |
申请公布日期 |
2006.06.28 |
申请号 |
EP20040773025 |
申请日期 |
2004.09.14 |
申请人 |
NIPPON MINING & METALS CO., LTD. |
发明人 |
OKABE, T.;NAGASAWA, M. |
分类号 |
B65B31/04;B65D81/20;(IPC1-7):B65B31/04;C23C14/34 |
主分类号 |
B65B31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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