发明名称 MULTISTEP PROCESS FOR CREATING IRREGULARITIES IN A REPATING ARRAY OF PATTERN ELEMENTS
摘要 Systems and techniques for printing substrates. In one implementation, a method includes patterning a substrate with a substantially arbitrary arrangement of features by introducing irregularity into a repeating array of features.
申请公布号 EP1673661(A2) 申请公布日期 2006.06.28
申请号 EP20040794707 申请日期 2004.10.07
申请人 INTEL CORPORATION 发明人 BORODOVSKY, YAN
分类号 G03F7/00;G03F7/20 主分类号 G03F7/00
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