发明名称 Semiconductor devices including protective layers on active surfaces thereof
摘要 A stereolithographic method of applying material to form a protective layer on a preformed semiconductor die with a high degree of precision, either in the wafer stage, when attached to a lead frame, or to a singulated, bare die. The method is computerized and may utilize a machine vision feature to provide precise die-specific alignment. A semiconductor die may be provided with a protective structure in the form of at least one layer or segment of dielectric material having a controlled thickness or depth and a very precise boundary. The layer or segment may include precisely sized, shaped and located apertures through which conductive terminals, such as bond pads, on the surface of the die may be accessed. A plurality of discrete protective structures may be formed on corresponding semiconductor devices that are carried by a large-scale semiconductor substrate. Dielectric material may also be employed as a structure to mechanically reinforce the die-to-lead frame attachment.
申请公布号 US7067901(B2) 申请公布日期 2006.06.27
申请号 US20030435327 申请日期 2003.05.08
申请人 MICRON TECHNOLOGY, INC. 发明人 FARNWORTH WARREN M.;WOOD ALAN G.
分类号 H01L23/544;H01L23/31 主分类号 H01L23/544
代理机构 代理人
主权项
地址