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发明名称
METHOD OF MANUFACTURING SILICON SUBSTRATE
摘要
申请公布号
KR20060071957(A)
申请公布日期
2006.06.27
申请号
KR20040110461
申请日期
2004.12.22
申请人
SILTRON INC.
发明人
KIM, HYUN CHUL;KIM, IN KYUM;JOO, HYUN SEOK;YANG, SU MI
分类号
H01L21/301
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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