发明名称 Substrate assembly for stressed systems
摘要 A substrate-assembly having a mechanical stress absorption system. The assembly includes two substrates, one of which has a mechanical stress absorbing system, such as a plurality of motifs that absorb thermoelastic stresses, to prevent cracking or destruction of the substrates or separation of one substrate from the other.
申请公布号 US7067393(B2) 申请公布日期 2006.06.27
申请号 US20040755006 申请日期 2004.01.08
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES S.A. 发明人 LETERTRE FABRICE;GHYSELEN BRUNO;RAYSSAC OLIVIER
分类号 H01L21/30;H01L21/20;H01L21/46;H01L21/762 主分类号 H01L21/30
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