发明名称 |
Method of manufacturing a fixed abrasive material |
摘要 |
Provided is a method for manufacturing a fixed abrasive material suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material having an open cell structure containing between about 5 and 85 wt % abrasive particles and a dry density of about 350 kg/m<SUP>3 </SUP>to 1200 kg/m<SUP>3</SUP>.
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申请公布号 |
US7066801(B2) |
申请公布日期 |
2006.06.27 |
申请号 |
US20030369628 |
申请日期 |
2003.02.21 |
申请人 |
DOW GLOBAL TECHNOLOGIES, INC. |
发明人 |
BALIJEPALLI SUDHAKAR;ALDRICH DALE J.;GRIER LAURA A.;ERDEM BEDRI;MEYERS GREGORY F. |
分类号 |
B24D11/00;B24D3/32;B24D13/14;B24D18/00 |
主分类号 |
B24D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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