发明名称 |
Method and apparatus for plasma forming inner magnetic bucket to control a volume of a plasma |
摘要 |
A plasma confinement arrangement for controlling the volume of a plasma while processing a substrate inside a process chamber includes a chamber within which a plasma is both ignited and sustained for processing. The chamber is defined at least in part by a wall and further includes a plasma confinement arrangement. The plasma confinement arrangement includes a magnetic array disposed inside of the chamber. The magnetic array has a plurality of magnetic elements that are disposed around a plasma region within the process chamber.
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申请公布号 |
US7067034(B2) |
申请公布日期 |
2006.06.27 |
申请号 |
US20000536347 |
申请日期 |
2000.03.27 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
BAILEY, III ANDREW D. |
分类号 |
C23F1/00;C23C16/00;H01J37/32;H01L21/306 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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