Method and apparatus for implementing competing control models

摘要

A method for controlling a process includes determining incoming state information associated with the process. A plurality of control models associated with the process is provided. A confidence metric is determined for each of the control models based on the incoming state information. The one of the plurality of control models having the highest associated confidence metric is selected. A control action for determining at least one parameter in an operating recipe used to implement the process is generated using the selected control model. A system includes a process tool and a process controller. The process tool is configured to process a workpiece in accordance with an operating recipe. The process controller is configured to determine incoming state information associated with processing the workpiece, determine a confidence metric for each of a plurality of control models based on the incoming state information, select the one of the plurality of control models having the highest associated confidence metric, and generate a control action for determining at least one parameter in the operating recipe using the selected control model.