发明名称 Sensor element having elevated diode with sidewall passivated bottom electrode
摘要 Each of an elevated diode sensor optoelectronic product and a method for fabricating the elevated diode sensor optoelectronic product employs a sidewall passivation dielectric layer passivating a sidewall of a patterned conductor layer which serves as a bottom electrode for an elevated diode within the elevated diode sensor optoelectronic product. The sidewall passivation dielectric layer eliminates contact between the patterned conductor layer and an intrinsic diode material layer within the elevated diode, thus providing enhanced performance of the elevated diode sensor optoelectronic product.
申请公布号 US7067891(B2) 申请公布日期 2006.06.27
申请号 US20030701670 申请日期 2003.11.04
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 YAUNG DUNN-NIAN;WUU SHOU-GWO;CHIEN HO-CHING;CHANG YI-SHING
分类号 H01L27/14 主分类号 H01L27/14
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