LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY,申请号KR20050127925-传众专利搜索

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发明名称	LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
摘要
申请公布号	KR20060072090(A)	申请公布日期	2006.06.27
申请号	KR20050127925	申请日期	2005.12.22
申请人	ASML NETHERLANDS B.V.	发明人	LOF JOERI;LUTTIKHUIS BERNARDUS ANTONIUS JOHANNES;SPIT PETER;FLUIT JEROEN
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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