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发明名称
FORMING METHOD FOR PROFILE OF STEP GATE ASYMMETRY RECESS
摘要
申请公布号
KR20060070363(A)
申请公布日期
2006.06.23
申请号
KR20040109071
申请日期
2004.12.20
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KIM, JOON HO
分类号
H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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