| 摘要 |
PROBLEM TO BE SOLVED: To provide a porous static pressure gas bearing having improved bearing rigidity and load capacity while suppressing the generation of self-exciting vibration. SOLUTION: The porous static pressure gas bearing 20 comprises a back metal 21, a circular recessed portion 23 formed in one face 22 of the back metal 21, annular recessed grooves 25-28 formed in a disc face 24 of the back metal 21, a dead-end hole 30 communicated with the annular recessed grooves 25-28, and a porous metal sintered layer 34 arranged in the recessed portion 23 of the back metal 21. The annular recessed grooves 25-27 serve as semi-closed chambers and the annular recessed groove 28 located most outside serves as a supply source for compressed gas from the dead-end hole 30 to the pores of the porous metal sintered layer 34. COPYRIGHT: (C)2006,JPO&NCIPI
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