发明名称 Particle detecting method and storage medium storing program for implementing the method
摘要 A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.
申请公布号 US2006132771(A1) 申请公布日期 2006.06.22
申请号 US20050289688 申请日期 2005.11.30
申请人 KABUSHIKI KAISHA TOPCON 发明人 SAITO SUSUMU;ISOZAKI HISASHI;KAKINUMA TAKASHI;NISHIOKA NORITAKA;NODA AKIRA
分类号 G01N15/02;G01N21/00 主分类号 G01N15/02
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