| 摘要 |
There is provided an optical element for an illumination system for wavelengths of <=193 nm. The illumination sytem includes a light source, a field plane, an exit pupil, and a plurality of facets. The plurality of facets receives light from the light source and guides the light to a plurality of discrete points in the field plane. The plurality of discrete points collectively illuminate a field in the field plane, and each of the plurality of facets illuminates a region of the exit pupil.
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