SYSTEM AND METHOD FOR SENSING USING ADJUSTABLE MODULATION TRANSFER FUNCTION (MTF)
摘要
A variable modulated transfer function (MTF) design employing a variable gate voltage source for use in inspecting specimens is disclosed. The design applies a variable gate voltage to each pixel of a sensor, wherein applying the variable gate voltage to each pixel adjusts the MTF of the pixel. MTF adjustment improves adverse effects encountered during inspection, such as abasing and maintaining contrast.
申请公布号
WO2005114697(A3)
申请公布日期
2006.06.22
申请号
WO2005US17844
申请日期
2005.05.19
申请人
KLA-TENCOR TECHNOLOGIES CORPORATION;CHUANG, YUNG-HO;ARMSTRONG, JOSEPH, J.;BROWN, DAVID, LEE;TSAI, BIN-MING, BENJAMIN
发明人
CHUANG, YUNG-HO;ARMSTRONG, JOSEPH, J.;BROWN, DAVID, LEE;TSAI, BIN-MING, BENJAMIN