| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the transmission of vibration and disturbance from the earth surface or surroundings to rough motion stage and precision state and accurately position a work piece. <P>SOLUTION: The stage device 220 is one that moves the work piece 200 around a first axis and along the first axis, and is provided with a first stage 238, a second stage 240 that retains the work piece, a second moving device 244, a measuring system, and an initializing system. The second moving device moves the second stage around the first axis relative to the first stage. The second moving device has a driving machine 255, and an attenuator that attenuates the transmission of vibration from the first stage to the second stage. The stage device is provided with a controlling system giving an output that positions the second stage and compensates for the vibration of the first stage to the driving machine. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
