| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a production method for enhancing characteristics of a piezoelectric thin-film resonator and improving electric power resistance. <P>SOLUTION: Flatness of end face portions and a principal plane is improved by previously performing a plasma treatment on a sacrificial layer, for forming an air-gap layer, formed between a vibrating part of the piezoelectric thin-film resonator and a substrate. By improving flatness and covering ability of a dielectric layer formed thereon, crystallinity of electrodes formed thereon is further improved, wiring resistance is reduced and characteristics are enhanced. Moreover, since the covering ability of the dielectric film is improved, the electrodes are prevented from being simultaneously eroded in the case of etching the sacrificial layer, thereby improving electric power resistance. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
