| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a hollow laminated piezoelectric element which is superior in durability and reliability and can perform high output, and to provide a manufacturing method of the element. <P>SOLUTION: The hollow laminated piezoelectric element 1 has a ceramic laminated body 10 where piezoelectric layers 11 formed of piezoelectric materials and inner electrode layers 21 and 22 having conductivity are alternately laminated, and a center through hole 14 passing along a lamination direction is formed. The ceramic laminated body 10 has a structure where at least a part of inner circumference ends of the inner electrode layers 21 and 22 is made to cut inside the ceramic laminated body 10 so that at least a part of the inner circumference ends of the inner electrode layers 21 and 22 is not exposed to the inner circumference face 104 of the ceramic laminated body 10. Inner circumference slits 13 where a groove depressed toward the inner part of the piezoelectric layer 11 from the inner circumference face 104 is formed in a circumferential direction is arranged in the inner circumference face 104 of the ceramic laminated body 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
