| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent a phenomenon where the film manufacturing of an alkali barrier layer and a metal back electrode layer is carried out at low cost and in a short time, and a light absorbing layer is peeled from an interface with a metal back electrode layer. <P>SOLUTION: This CIS system thin film solar battery 1 and a method for manufacturing this CIS system thin film solar battery 1 are provided to laminate a glass substrate 2, a non-alkali layer 7 such as silica, a metal back electrode layer 3 in a laminate structure, a p-type CIS system light absorbing layer 4, a high resistance buffer layer 5, and an n-type window layer 6 in this order. The layer 7 or the first layer 3a of the layer 3 as well as this layer 7 can be formed as an alkali barrier layer 8 for preventing and controlling the thermal diffusion of alkali components from the substrate 2 to the light absorbing layer 4 at the time of manufacturing the layer 4. The layer 3a is configured of fine and highly dense crystal grains. The layer 7 is manufactured by an RF or DC spatter method on the substrate, and the layer 3 is continuously manufactured on the layer 7 by the DC spatter method. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
