ULTRASONIC VIBRATOR AND FLOW MEASUREMENT APPARATUS OF FLUID USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic vibrator of high reliability having an audio matching layer which forms organic glass to a ceramics porous substance. SOLUTION: The ultrasonic vibrator 1 is constituted by a piezoelectric substance 3 of a rectangular solid and the audio matching layer 4 is composed of two layers of a first matching layer 5 comprising the ceramics porous substance and a second matching layer 6 comprising dry gel of the organic glass. By sealing the first and second matching layers 5 and 6 with a flexible elastomer, long-term dynamic reliability is improved. COPYRIGHT: (C)2006,JPO&NCIPI