发明名称 BONDING TOOL
摘要 PROBLEM TO BE SOLVED: To obtain a bonding tool capable of preventing flatness of a face at the time of temperature rise from deteriorating even when the long side of a bonding head is longer and the temperature is high at the time of bonding. SOLUTION: The structure of the bonding tool is composed so that the T-shaped bar-like bonding head having the bottom face edge on a bonding face, and both sides of the bottom face is fixed so as to be parallel to a long flat plate-shaped metallic holder. The bottom face edge of the bonding head is clamped so as to be sandwiched between a retaining metal and the holder and fixed to the holder. Consequently, the flatness of the face can be maintained. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006165334(A) 申请公布日期 2006.06.22
申请号 JP20040355774 申请日期 2004.12.08
申请人 NIPPON TUNGSTEN CO LTD 发明人 KOE NORIMITSU
分类号 H01L21/60 主分类号 H01L21/60
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