摘要 |
PROBLEM TO BE SOLVED: To mix liquid of different viscosities while maintaining effects such as reduction of reagent in a minute flow passage. SOLUTION: In a flow rate control device, desired target flow rate value 58 is established in a data establishment part 59 of a flow rate control device 50 for each liquid A and liquid B. Consequently, the flow rate control device 50 determines apply voltage values 68A, 68B for vibrating piezoelectric element 11a, 11b to make flow rate of liquid A, B transferred via minute flow passage from each micro pump a set target flow rate 58 in the flow rate control device 50. Voltage EA, EB of the apply voltage values 68A, 68B are applied to the piezoelectric element 11a, 11b. COPYRIGHT: (C)2006,JPO&NCIPI
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