| 摘要 |
PROBLEM TO BE SOLVED: To stably supply an optical member having a maximum value of double refraction of≤2 nm/cm. SOLUTION: A method for producing quartz glass comprises forming a quartz glass ingot on a target by ejecting a silicon compound raw material and a combustion gas from the upper part of the central part of a furnace, then forming SiO<SB>2</SB>particles by subjecting the raw material to hydrolysis or oxygen decomposition in a flame, depositing the formed SiO<SB>2</SB>particles on the target, and at the same time, transparentizing the deposited SiO<SB>2</SB>particles by melting them by the flame. The target is swung in two directions perpendicular to the axis of ingot and orthogonal to each other, and the swing width of the target in at least one direction of the two directions is set to be≥20% of the diameter of the ingot. Further, the rotation speed of the target is set to be≥25 rpm. COPYRIGHT: (C)2006,JPO&NCIPI
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