| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave treatment device and a microwave treatment method where, as the thermal deformation and perforation in the opening part of a vessel made of plastics are prevented, a thin film is deposited even on the inside of the opening. SOLUTION: In the microwave treatment device 10 where reaction gas is converted into plasma by microwaves MW, and a thin film is deposited on the inside of a vessel A made of plastics, the vicinity of the inside of the opening in the vessel A made of plastics is provided with a microwave shielding body 14 for shielding microwaves MW. The space between the inside of the opening part in the vessel A made of plastics and the microwave shielding body 14 is provided with a space to be a passage for allowing reaction gas to pass through. Further, the microwave shielding body 14 is provided with through holes 14-1 or a network part 14-2 for allowing reaction gas to pass through. COPYRIGHT: (C)2006,JPO&NCIPI
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